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	Vacuum Deposition Equipment Mega-Sapio 1700（SGC-MS1700i）
	Vacuum Deposition Equipment Sapio Series（SGC-S900 / 1300/1550/1700）
	Vacuum Deposition Equipment SEC-22C
	Small Vacuum Deposition Equipment SEC-06D / SEC-08C
	AuSn Vacuum Deposition Equipment SEC-S900C
	Vacuum Deposition Equipment for Plasma-resistant Films SEC-S1300i
	Batch Type Vacuum Deposition Equipment SDC-1300F
	Arc-Discharge-Type Ion Plating Equipment SIA-400T
	Load Lock Type Sputtering Equipment SPH-2500T-Ⅱ
	Load Lock Type Pass-Through Model Sputtering Equipment SPH-2410-Ⅱ
	Load Lock Type Carousel Model Sputtering Equipment SPC-2507-Ⅱ
	In-line Sputtering Equipment SPH-5000 Series
	Single-wafer Sputtering Equipment SPM Series
	Carousel Model High Speed Sputtering / Polymerization Equipment SPP-155TC
	Injection Molding Machine Linked High Speed Sputtering / Polymerization Equipment SPP Series
	Single Wafer Type RIE Equipment SPE-6000 Series
	Batch Type RIE Equipment SPE-8000 Series
	Plasma Cleaning Equipment SPE-2136A
	Wafer Trimming Equipment SST-M01T
	Atomic Layer Deposition Equipment ALD Series
	Lord Lock Type Ion Beam Frequency Adjustment Equipment SFE-B03-Ⅱ
	In-line Type Ion Beam Frequency Adjustment Equipment SFE-X2012
	High Vacuum Annealing Equipment SAF-52T-Ⅱ
	In-line Type High Vacuum Annealing Equipment SAF-X1201
	Optical Film Thickness Control System Lafio / APEX Series
	Wireless temperature monitor
	Crystal Monitor COÅT LEADER®
	Equipment for aerospace industry SNC Series
	Image Recognition System
	Edge Computing System for Predictive Maintenance EPIoT®
	Hall Accelerated Ion Source / Plasma Bridge Neutralizer ISH-030/PBN-80
	High power RF Ion Source ISG Series
	Ion source for Etching IGF Series
	High Usage Efficiency Cathode
	Power Saving Device for Oil Diffusion Pump ECO-22/26
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