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Components

Vapor Deposition Equipment for Optical Thin Film
      - Low Particle specification -

Vacuum Spectral Characteristic Monitor Spectra-Ace

Outline


    Q: Do you know that the causes of vapor deposition equipment for optical thin film yield deterioration are particles and contamination?

    Sapio took the measures from the side of equipment against the cause not solved only by process!


  1. The cause due to particles is not limited to a single one!
  2. There are some causes not solved only by process.
  3. We recommend you to take "Sapio's Low particles Spec" into consideration when facing difficulties.


  4. We have thoroughly studied the cause due to particles and taken proper action against it by reviewing not only the process but also system configuration.
    You are urged to take "Sapio" into consideration when facing difficulties in improving yield.

Features

Features of Low particle specification

Hight transparency
Lower particles even for a spot light source

Features of Low particle specification

Contamination reduction is clearly observed by the special gauge.

Features of Low particle specification

The digitized measurement of particles shows 50% or less reduction.

*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law. Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.