for Optical Devices
Vacuum evaporation system Sapio-DBR （SGC-S1300i/1550i/1700i）
Ideal for forming optical multilayer DBR film for LED!
General Outline（SGC-S1700i）
- Excellent mass production performance
- Number of mounted substrates
- φ6 inch wafers：Approximately 70 pieces / batch
φ4 inch wafers：Approximately 170 pieces / batch
- Tact time
- within 3 hours /batch (31 layers configuration)
- Required installation area
- W 5,000 mm x D 7,000 mm x H3, 100 mm
- Excellent batch-to-batch repeatability: also supports continuous batch guarantee
- Adjustment of film quality is possible. Technical cooperation of condition correction is possible to suppress film damage due to Chipping.
Features/ Options
- High efficiency exhaust system
- High precision film thickness control system：Wavenavigator, Lafio
- High-power large-area irradiation RF ion source ISG series
- Substrate heating heater：Halogen lamp Within 120 ° C ± 5 ° C
- Low particle specification (optional)
Applications
- LED DBR (Distributed Bragg Reflector) film formation
Specifications (Reference: SGC-S1700i)
| Processing method |
Batch type |
| Exhaust pump |
26 inches DP x 2 + RP + MBP + Meissner trap |
| Installation dimensions |
W5,000㎜×D7,000㎜×H3,100㎜ |
| Equipment weight |
9,300kg |
| Power supply capacity |
AC200V（3φ） / about 130kVA |
| Vacuum chamber size |
φ1,700㎜ |
LED device configuration
Used as LED reflective film
Reasons for choosing DBR
Al film, Al + reflection film
- Crystal defects occur due to stress caused by thermal deformation. It leads to the deterioration of the product.
- There is a limit to the increase of reflectance in Al reflective film.
DBR (dielectric multilayer film mirror)
- There is little deterioration due to thermal deformation
- Realization of high reflectance that cannot be obtained with aluminum reflective film
DBR spectral characteristics example
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
