Large-sized sputtering system compatible with 8-inch wafers.
Single-wafer type, suitable for continuous operation and mass production with cassette to cassette.
In order to suppress contamination from the target, we adopted the sputter UP method.
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.