Measure substrate temperature on rotating substrate dome in real time
| ■ An extension | ||
|---|---|---|
| Items | Specifications | Remarks |
| sensor | K type heat resistant pair (1~3 pcs / extension) | Heat resistant 260℃ |
| measurement error | ±2℃（10～70℃） ±3％（70～250℃） | Trial calculation from actual value of calibration certificate |
| Body heat resistance temperature | 100℃ | Special box for high temperature |
| Power supply | Coin battery | Heat resistant specification (CR2032W) |
| Size | 50㎜ × 70㎜ × H10㎜ | Minimum configuration |
| Recording cycle | 2, 5, 10sec | Switchable by rotary switch |
| Battery life | 3 to 6 days (5 sec cycle) | Continuous use with CR2032W (indication) |
| ■ Master device | ||
| Items | Specifications | Remarks |
| Output | DC × 3ch | DC output (3 ch) ⇔ 0-400℃ (USB master device is not included) |
| Number of extensions | extensions x 3 / master device | Can identify 16 addresses (The address of the USB master is fixed) |
| Communication method | IEEE802.15.4 | PAN |
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
