> Product Information > for Electronic Devices > SPP-155T;
Product Information for Quartz Devices for Electronic Devices for Optical Devices Components New Technology Application Examples

for Electronic Devices (Sputtering & Ion Plating)

High Speed Sputtering / Polymerization Equipment SPP-155TC

High Speed Sputtering / Polymerization Equipment SPP-155T;

Sputtering equipment that can operate in small lots and high cycles

General Outline

For production sites pursuing improve product quality and yield, equipment that can operate in small lots and high cycles is undoubtedly the most suitable. SPP-155TC is a machine developed based on this consideration. Being able to produce in small lots can minimize losses when a lot defect occurs. By operating in a high cycle, the newly molded work can be processed immediately, so it is possible to shorten the time to absorb moisture. With high frequency operation, newly formed workpieces can be processed immediately, thereby shortening the time to absorb moisture. Therefore, unlike the depositing machine, there is no need for the sputtering equipment to replenish materials for each batch. We aim to provide ideal equipment for production sites that do not want to compromise on output and quality.

Main Applications

Decorative Film Coating

Product Example

Automotive interior parts / Automotive headlamp reflector

Product specifications

Vacuum chamber size□850×H1800mmInstallation dimensionsW4000×D4000×H2700mm
Corresponding work sizeΦ600mm×H1200mmMain pumpingTMP×2+CP×1
Cycle time4 minutes / cycle (reference value)Cathode6 x 55 inch magnetron cathode

Inside the vacuum chamber

  • Target (6 x 55 inches)
  • Jig pole
  • Polymerized electrode

*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law. Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.