for Quartz Devices / Electronic Devices
(Sputtering & Ion Plating)
Load Lock Type Pass-Through Model Sputtering Equipment
SPH-2410-Ⅱ
Sputtering system capable of forming two types of films on both sides.
Production capacity is about 1.5 times that of SPH-2500T-II.
General Outline
This equipment is a load lock type pass-through type sputtering equipment developed for the purpose of film formation of base electrode of quartz crystal. Consists of two chambers (a loading/unloading chamber and a sputtering chamber), and by performing fully automatic interlocking from heating to film forming and taking out, it becomes possible to make the line of "base electrode film forming process" and improve productivity and save labor.
Features
- Outer dimensions: W1,100 mm × D2,500 mm × H1,205mm
(Signal Tower not included)
- This is a system that can operate with high tact time by simultaneous deposition on both sides.
- Compared with the SPH-2500T-II, the processing volume of one lot has been increased by about 1.5 times.
- Adopted a rack and pinion system to achieve stable conveyance.
The rack and pinion system improves transport controllability.
Applications
Formation of metal films for electrodes on various electronic components
Improved operability
Displays troubleshooting on the screen when an alarm occurs.
Recipe can be set for each tray, and up to 10 layers / trays can be deposited.
Specifications
- Exhaust pump
- Rotary pump ＋ Cryo pump
- Installation dimensions
- W1,100㎜ × D3,965㎜ × H1,280㎜
- Equipment weight
- Aprrox. 2,000 kg
- Power supply capacity
- AC200～220V (3φ) / 35kVA (99A)
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
