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Load Lock Type Carousel Model Sputtering Equipment SPC-2507

Load Lock Type Carousel Model Sputtering Equipment SPC-2507;

Sputtering system capable of forming two types of films on both sides

Features

  1. Outer dimensions: W1, 280 mm × D 1,150 mm × H 1, 873mm, Lower height
  2. Low temperature deposition is possible by suppressing the temperature increase during sputtering to solve the heat problem that could not be solved with the pass-through type SPH-2500T-II.
  3. Non-contact power transmission method using magnets (MagTran) is adopted for substrate rotation and reversal mechanism.
    * MagTran is a registered trademark of FEC Co., Ltd.

Options

  • Power exchange function
  • For adjusting the film thickness distribution in the rotational direction
  • Cathode (3rd source)

Applications

Formation of metal films for electrodes on various electronic components

Advantages of carousel model sputtering

Low-temperature film formation
Enables low-temperature deposition at 130°C or lower, which is effective for measures such as preventing Cr spreading.
(Low temperature deposition is possible due to the short time of exposure to plasma.)

Outline

Exhaust PumpRotary pump＋Cryo pump
Installation DimensionsW1,280㎜×D1,150㎜×H1,873㎜
Equipment Weight1,500kg
Power Supply CapacityAC200～220V　/　17kVA（50A）

*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law. Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.

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