for Electronic Devices (Sputtering & Ion Plating)
Ion Plating Equipment SIP-1600F
Large ion plating system suitable for decorative films
General Outline
SIP-1600F is a cost-effective ion plating equipment. It mounts the substrate on the rotation / revolution jig cart and puts the entire cart into a large vacuum tank, which can be batch processed at one time.
Since the film can be formed well by the effects of the rotation / revolution mechanism and the ion plating mechanism, it also supports substrates with complicated shapes.
Features / Options
- The ion plating mechanism enables a film to be deposited with excellent uniform thickness.
- Six-axis or eight-axis rotation/revolution jigs can be equipped depending on work size.
6 axes (Φ440 mm × H1,650 mm/axis: Work mounted area)
8 axes (Φ360 mm × H1,650 mm/axis: Work mounted area)
- It has high productivity with two sets of rotation/revolution jig carts.
- Equipped with 2 pairs of switching resistor heating vapor sources, it is possible to deposit two types of metal materials in the same batch.
- Since equipped with a freezer, the exhaust speed for H2O is improved.
- According to production volume, a chamber of corresponding size can be provided.
Applications
Various decorative formed films
Discontinuous films
Protection films against electromagnetic radiation
Specifications
- Processing method
- Batch type
- Exhaust pump
- RP ＋ MBP ＋ DP
- Installation dimensions
- W4,700㎜ × D7,000㎜ × H3,100㎜
- Equipment weight
- 11,000 kg
- Power supply capacity
- AC200V（3φ, 1φ） / 130kVA（470A）
- Chamber size
- φ1,600㎜ × H2,300㎜
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
