Components
Inner Heat type Oil Diffusion Vacuum Pump Unit SFD Series
Realizing energy saving and high efficiency
Outline
While enough attention has been recently paid to the global environmental issues, we have improved oil diffusion vacuum pumps which have been supported from the past,
and realized energy saving and high efficiency of the pumps.
Features
- We have employed an inner heat type sheath heater as an oil heater,
and realized power saving.
- Pumping performance has been remarkably enhanced thanks to the improvements of jets.
- Pump startup time has been reduced.
- Direct-water-cooled-type cold cap built into the baffle suppresses
an oil-back even though it is a water-cooled type.
- You can momentarily check oil amount and contamination with the oil
level gauge.
And you just need easy maintenance; early replacement of oil leads to
high work efficiency.
Specifications
| Model | SFD-22C | SFD-26C |
|---|
| Heater power (kW) | 7.8 | 10.8 |
|---|
| Heater efficiency (%) | 93 | 93 |
|---|
| Pumping speed (m3/sec) *1 | 6.5 | 10 |
|---|
| Critical back-pressure (Pa) | 27 | 31 |
|---|
| Ultimate pressure (Pa) *2 | 3 × 10-5 | 3 × 10-5 |
|---|
| Required power Φ3 200W (kW) | 7.8 | 10.8 |
|---|
| Operating oil (L) | 5 | 6 |
|---|
| Cooling water flow rate (L/min) | 12 | 16 |
|---|
| Startup time (min) | 35 | 15 |
|---|
| Cooling time (min) | 20 | 60 |
|---|
| (Equip proper + Baffle) Weight (kg) *3 | 260 | 386 |
|---|
| *1: Pumping speed is measured just above the baffle.
*2: 3 × 10-5 (Pa) ≈ 0.027 mmPa
*3: Weight without oil |
|---|
Dimentions
| SFD-22C | SFD-26C |
| A | 948 | 1221 |
| B | 550 VG | 650 VG |
| C | 480 | 550 |
| D | 447 | 700 |
| E | 150 VG | 150 VG |
F
(Intake bore) | 550 | 650 |
| Unit: mm
VG = JIS standard flange dimension |
Power Saving Unit (option of SFD-22C)
- Environmental measures / reduction of electric power -
We can provide you with power saving unit and heat insulation jacket as a set.
This set can be easily installed to our inner heat type oil diffusion pump
(SFD-22C), contributing to environmental measures as well as reduction of
electric bills without practically lowering pumping performance.
You
can easily introduce a power saving unit to your SFD-22C.
Just connect it to the wiring between MS and DP and attach the heat insulation jacket at the bottom of the DP main body.
We will estimate an actual power saving effect based on the equipment you are using. Please feel free to contact us.
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
