for Electronic Devices (Sputtering & Ion Plating)
Small vacuum deposition equipment SEC-06D / SEC-08C
- Compact model of metal thin film deposition device
- Ideal for from research and development to small volume production
General Outline
- This device is a vacuum deposition device for evaporating metal materials using a resistance heating evaporation source to form a thin film on a substrate.
- The device is a batch type, equipped with a rotating jig, and performs film formation with good covering power.
- The film thickness is controlled by a crystal oscillation type film thickness meter.
- The operation control system is fully automatic.
- Depending on the application, it is possible to support not only the rotation type but also the dome type & the rotation and revolution type.
- It is possible to start research and development and small lot production at a low cost and at a reasonable price.
- Customization to load lock type is also possible.
Features
- Easy operation by fully automatic method
- Ideal for from research and development to small volume production
- Vacuum chamber is a front door type with high maintainability
- Compact design integrating operation and control system
Options
- Revolving dome type jig / Planetary centrifugal jig / Heating system / Load lock compatible
Applications
- Metal decorative parts / For paint evaluation such as undercoat and top coat
Outline
| Vacuum Chamber |
W500㎜×D500㎜×H600㎜ |
| Footprint |
W1,240㎜×D1,300㎜×H2,000㎜ |
| Equipment Weight |
500kg |
| Power Capacity |
AC200V（3φ） / 9.8kVA（28A）
|
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
