for Electronic Devices (Sputtering & Ion Plating)
Batch type vacuum deposition system SDC-1300F
Standard model for decorative film
General Outline
It is equipment capable of film-formation with various metals by vacuum deposition.
With two substrate carts attached, substrates and deposition materials can be replaced during film-formation, which realizes excellent mass productivity.
Two different metals can be evaporated with two sets of evaporation sources.
Features / Options
- Vacuum chamber: φ1, 300 mm × H1, 600 mm
- Internal jig system
①Number of self-revolution jigs: 6 axes or 8 axes
②Jig space: 6 axes φ 380 mm × H 1, 200 mm, 8 axes φ 300 mm × H 1, 200 mm
- Evaporation source system
①resistance heating system: 2 points switching type
Applications
Various metal decorative films
Mirror, reflector
Specifications
- Processing method
- Batch type
- Exhaust pump
- RP + MBP + DP + poly cold
- Installation dimensions
- W3,500㎜ × D5,200㎜ × H2,700㎜
- Equipment weight
- 7,300 kg
- Power supply capacity
- AC200V（3φ/1φ） / 90kVA（300A）
- Chamber size
- φ1,300㎜ × H1,600㎜
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
