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Rotary Cathode

Rotary cathode

Achieved over 80% usage efficiency!

General Outline

It is a cathode that boasts a usage efficiency of over 80% by sputtering while rotating a cylindrical target.

Features / Options

  1. Up to about 90% usage efficiency.
  2. Target internal diameter φ 162 mm. The longitudinal direction can be up to about 2m.
  3. Supports low nodules and high power.
    *Usage efficiency is out of warranty.

Applications

Ideal for thick film deposition on large areas (solar panels, touch panels, etc.)
Rotary cathode image1 Rotary cathode image2 Rotary cathode image3

*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law. Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.

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