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Components

Optical film thickness control system　Lafio/APEX series

Optical film thickness control system Lafio/APEX series Optical film thickness control system Lafio/APEX series display

Optimal for stable optical film thickness control

Optical film thickness control system Lafio/APEX series wavenavigator

General Outline

This system controls the optical film thickness with high accuracy by combining with a vacuum evaporation equipment.
Furthermore, it is possible to achieve full automation by combining this system with the condition setting computer and the sequence.

Features / Options

  1. Detects the extremum (peak) of the light reflection (transmission) rate with an accuracy of 0.1% or less by high-speed computation of up to 99 layers.
  2. Employs a diffraction grating (grating). Wavelength setting is possible at 1 nm pitch between 380 and 2,000 nm. ※ In the case of APEX
  3. Automatic switching of visible region and near infrared region. No need to replace the optical receiver.
  4. As a result of mounting a diffraction grating on the optical receiver side, the structure is not susceptible to external light.
  5. Accurate peak detection is possible even with about 1% change in light intensity.
  6. Stable operation when S / N ratio inferior is possible by adoption of prediction calculation method.

Applications

Optical film thickness control of vacuum evaporation equipment
Optical Monitor Lineup
ModelMeasurable wavelength [nm]Light sourceLight receiving elementOptical systemPhotometric method
APEX380～2,000Halogen lampSi-PD, PbSMirror box typeReflection / transmission
APEX-UV200～1,000Xe lampPMT, Si-PDMirror box typeReflection / transmission
APEX-IR2,000～4,200SiliconitPbSeMirror box typeReflection / transmission
Lambda380～1,000Halogen lampSi-PDMirror box typeReflection / transmission
Lafio Plus350～1,100Halogen lampSi-PDOptical fiber typeReflection
Direct monitor400～900Halogen lampCCD(Si)Optical fiber typetransmission

*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law. Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.

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