Components
High power RF ion source ISG series
Achieves a wide range of stable ion irradiation.
General Outline
A wide range of stable discharges is possible, and it can be used in a variety of applications from non-shift films of optical filters to adhesion improvement to resin substrates.
With regard to discharge performance, a unique approach enables reliable ignition and stable discharge.
Features / Options
- High-power ion source with a beam current of 1,700 mA / beam voltage of 1,500 V / ion current density of 150 μA / cm2 or more
- Achieved high power uniformity of ion current density distribution ± 5% or less.
*It is a measurement result with Sapio-1300. It is limited to our designated condition.
- Stabilize the neutralizer by adopting an auto matcher and achieve a large output of emission current of 3,000 mA by adopting a newly developed collector electrode (patent pending). Prevents particle generation due to charge up.
- Lineup according to chamber size, dome curvature, etc.
Applications
Ion-assisted deposition of optical thin films
Etching process of substrate surface
ISG Series Lineup
| Item | ISG-130 | ISG-180 | ISG-230 |
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| Output | Beam voltage | 100～1,500V |
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| Beam current | 800mA | 1,500mA | 2,500mA |
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| ACC voltage | 1,000V |
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| RF | 1,000W | 2,000W |
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| NEUT Emi | 2,500mA | 3,200mA |
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| NEUT RF | 300W |
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| Supported equipment | SEC-22Ci | SGC-S900i | Sapio1300~1700 | Sapio1550~1700 |
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| Dome diameter | φ625㎜ | φ800㎜ | φ1,150㎜～1,600㎜ | φ1,400㎜～1,600㎜ |
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| Use | Metal film pretreatment | Dielectric film | Dielectric film | Complex shape of dielectric film | High power (high current) dielectric film |
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Ion current density distribution
Achieves high uniformity of ion distribution even for domes of φ 1,400mm or more.
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
