Components
High usage efficiency Cathode
- Achieved over 40% usage efficiency! -
General Outline
We have improved the conventional 5 x 7 inch cathode and developed a cathode with a usage efficiency of 40% or more.
By extending the target life, the maintenance cycle becomes longer, and the recovery loss of precious metal targets is also reduced.
Features / Options
- The use efficiency is as high as 44%.
- Modification of the existing 5 x 7 inch cathode is also possible.
- 5 x 10 inch cathode is also available.
*Usage efficiency is out of warranty.
Applications
Suitable for precious metal target and thick film deposition
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
