Components
Crystal monitor COÅT LEADER
Highly accurate film thickness monitoring and rate control is possible.
General Outline
Taking advantage of the technology of quartz device manufacturing equipment that has been cultivated for many years by our company, the accuracy of this system has been significantly improved compared to the conventional measurement method by adopting the frequency measurement method with a network analyzer.
Features / Options
- Adopts reflection measurement by network analyzer
- Improved film thickness control accuracy
- Improved deposition rate stability
- Realization of life extension of crystal oscillator
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
