Equipment Ion Plating
Equipment Sputtering
Equipment Atomic Layer Deposition
Equipment
Vacuum Deposition Equipment
Vacuum Deposition Equipment
Mega-Sapio1700 (SGC-MS1700i)
Pursuit of increased production volume and one unit achieves productivity equivalent to two units
Vacuum Deposition Equipment
Sapio Series
（SGC-S900/1300/1550/1700）
High-performance model in pursuit of batch-to-batch deposition reproducibility
Vacuum Deposition Equipment
SEC-22C
Standard model of metal thin film deposition equipment
Small Vacuum Deposition Equipment
SEC-06D / SEC-08C
Compact model of metal thin film deposition equipment
AuSn Vacuum Deposition Equipment
SEC-S900C
Thick films can be deposited at low temperatures by simultaneous Au/Su dual source deposition.
Vacuum Deposition Equipment for Plasma-resistant Films
SEC-S1300i
Thick Y₂O₃ film with high corrosion resistance can be deposited and shield film can be formed.
Batch Type Vacuum Deposition Equipment
SDC-1300F
Standard model for decorative film
Ion Plating Equipment
Sputtering Equipment
Load Lock Type Sputtering Equipment
SPH-2500T-Ⅱ
Sputtering equipment capable of forming two types of films on both sides
Load Lock Type Pass-Through Model Sputtering Equipment
SPH-2410-Ⅱ
Sputtering equipment capable of forming two types of films on both sides
Load Lock Type Carousel Model Sputtering Equipment
SPC-2507-Ⅱ
Sputtering equipment capable of forming two types of films on both sides
In-line Sputtering Equipment SPH-5000 Series
SPH-5000 Series
Sputtering equipment for mass production of large substrates
Single-wafer Sputtering Equipment
SPM Series
Single-wafer large-sized sputtering equipment
Carousel Model High Speed Sputtering / Polymerization Equipment
SPP-155TC
Sputtering equipment that can operate in small lots and short cycle time
Injection Molding Machine Linked High Speed Sputtering / Polymerization Equipment
SPP Series
Metal films and protective films on resin substrates can be formed fully automatically
