Carousel Model High Speed Sputtering / Polymerization Equipment
SPP-155TC
Sputtering equipment that can operate in small lots and short cycle time
This equipment is a batch-type system that can sputter and heavily synthesize films on large products, but still operates in a high-cycle operation. It contributes to production sites that want to improve product quality and yield.
Applications
Decorative film coating
Product Example
Automotive interior parts / Automotive headlamp reflector
Features
- 1. Short cycle time (1cycle / approx.4min.)
High rate by 120kW power supply and high speed exhaust with 3 pumps realize short cycle time. - 2. Large substrate support
The substrate installation area is as wide as Φ500mm x H1200mm, enabling deposition on large substrates. - 3. Automated operation for improved work efficiency
Automation of opening and closing the vacuum chamber door and raising and lowering the sputter cathode is possible.
Specifications
| Exhaust Pump | Main pumping：TMP×2＋CRYO×1 Rough pumping：RP×1＋MBP×1 |
|---|---|
| Installation Dimensions | W4,000mm×D4,000mm×H2,700mm |
| Weight | 6,200kg |
| Power Supply Capacity | AC200～220V／Approx.160kVA |
