Batch Type RIE Equipment
SPE-8000 Series
Batch type RIE equipment standard model
It is a batch type RIE equipment with high processing capacity.
24 wafers of 4-inch or 11 wafers of 6-inch can be processed simultaneously.
The atmosphere transfer chamber is compatible with cassette and use a dual-arm robot to enable efficient transfer.
Applications
RIE processing for various wafer electronic components
Features
- 1. Mass batch processing is possible as RIE.
- 2. By using a dual-arm robot to transfer wafers, wafers can be efficiently replaced from the cassette.
- 3. Etching distribution: within ± 5%, Cycle time: 20min/batch
Specifications
| Exhaust Pump | DRP＋MBP＋TMP |
|---|---|
| Installation Dimensions | W2,800mm×D2,400mm×H2,025mm |
| Weight | 2,400kg |
| Power Supply Capacity | AC200V(3φ)／25kVA(73A) |