Single Wafer Type RIE Equipment
SPE-6000 Series
Single wafer type RIE system standard model
This is a single wafer RIE machine equipped with three RIE rooms. The cassette room is attached and continuous operation is possible by replacing the cassette. It is compatible with φ4 inch and φ6 inch wafers.
Applications
RIE processing for various wafer electronic components
Features
- 1. Cassette to cassette cluster type
- 2. Etching distribution：± 1.5% (φ4inch), ± 2.5% (φ6inch)
Specifications
| Exhaust Pump | DRP＋MBP＋TMP |
|---|---|
| Installation Dimensions | W4,000mm×D3,000mm×H2,200mm |
| Weight | 4,500kg |
| Power Supply Capacity | AC200V(3φ)／49kVA(143A) |