Small Vacuum Deposition Equipment
SEC-06D / SEC-08C
Compact model of metal thin film deposition equipment
This equipment is capable of depositing metallic materials using either a resistance heating evaporation source or an electron beam evaporation source.
Suitable for R&D and small lot production.
Applications
Electrode film formation of various electronic parts
Metal decorative parts
For paint evaluation such as undercoat and topcoat
Features
- 1. Vacuum chamber is a front door type with high maintainability
- 2. Compact design integrating operation and control system
- 3. Film thickness control by crystal oscillation type film thickness meter
- 4. Good throwing power by adopting a self-revolution jig
Options
Revolving dome type jig ／ Heating mechanism ／ Electron beam evaporation source
Specifications
| Exhaust Pump | SEC-06D：DP＋RP SEC-08C：DP＋CRYO |
|---|---|
| Installation Dimensions | W1,240mm×D1,300mm×H2,000mm |
| Weight | 500kg |
| Power Supply Capacity | AC200V(3φ)／9.8kVA(28A) |