Image Recognition System
Automatic recognition of micro products possible
Image recognition system enables position detection of micro products, detection of foreign particles on substrate, wafers, orientation flats and notches.
Applications
Alignment of contact for micro products
Detection of product misalignment in tray
Detection of foreign matter in wafer, orientation flat / notch
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is a registered trademark of Showa Shinku.
Features
- 1. The shift amount between the imaging target and the reference point is detected, and the X and Y stages are controlled to correct the shift amount.
- 2. An abnormality is detected by comparing the imaging target with the sample image.