In-line Type High Vacuum Annealing Equipment
SAF-X1201
High-vacuum annealing equipment for in-line heat treatment of crystal units
Applications
Removal of internal stress strain generated during processing of crystal units.
Release outgases contained in SMD packages.
Stabilize the electrode film
Features
- 1. This in-line vacuum heat treatment system is mainly used for heat treatment to remove internal stress strain generated during processing of quartz crystal to stabilize electrode films.
- 2. The system consists of three chambers: a Loading chamber, a processing chamber, and a cooling chamber, and is fully automated from annealing to cooling after tray stocking. The system can be connected to LD/ULD to form a line, which contributes to improved productivity and labor savings.
- 3. Tact time of approx. 440 seconds (=7 min.20 sec.)/sheet is achieved with W220mm × D140mm trays.
- 4. Full automation of annealing process contributes to yield improvement.
Specifications
| Exhaust Pump | RP+TMP+MBP |
|---|---|
| Installation Dimensions | W3,210mm×D1,500mm×H2,282mm |
| Weight | Approx.4,000kg |
| Power Supply Capacity | AC200V／24 kVA(69A) |