Optical Film Thickness Control System
Lafio / APEX Series
Stable and precise optical film thickness control
This system controls the optical film thickness with high accuracy by combining with a vacuum evaporation equipment.
Furthermore, it is possible to achieve full automation by combining this system with the condition setting computer and the sequence.
Features
- 1. Detects the extremum (peak) of the light reflection (transmission) rate with an accuracy of 0.1% or less by high-speed computation of up to 99 layers.
- 2. Improved light intensity stability by reference control
- 3. Automatic switching of visible region and near infrared region. No need to replace the optical receiver.
- 4. As a result of mounting a diffraction grating on the optical receiver side, the structure is not susceptible to external light.
- 5. Accurate peak detection is possible even with about 1% change in light intensity.
- 6. Stable operation when S/N ratio inferior is possible by adoption of prediction calculation method.
Optical monitor lineup
| Model | Measurable wavelength[nm] | Light source | Light receiving element | Optical system | Photometric method |
|---|---|---|---|---|---|
| APEX | 380～2,000 | Halogen lamp | Si-PD、PbS | Mirror box type | Reflection / transmission |
| Lafio Plus | 350～1,100 | Si-PD | Optical fiber type | Reflection | |
| Direct monitor | 400～900 | CCD(Si) | transmission |