Hall Accelerated Ion Source / Plasma Bridge Neutralizer
ISH-030/PBN-80
Achieves high output ion irradiation despite being a compact ion source
Applications
Ion-assisted deposition of optical thin films
Applications
- 1. High-current type large enough even when installed in large equipment.
- 2. Because it is compact, it is easy to install.
- 3. No ignition failure and shortened start-up time.
- 4. Gridless reduces operating costs and reduces maintenance time.
Reference data
Specifications
| Size | Φ115mm×H105mm |
|---|---|
| Anode current [mA] |
1,000～5,000mA * Middle Power ：For 400V or more, up to 4,000mA * High Power ：For 500V or more, up to 3,000mA |
| Anode voltage [V] | Middle Power：200～500V High Power：300～600V |
| Emission current[mA] | MAX：6,500mA |
| Gas related | ISH：Ar, O2 ／ PBN：Ar |