Crystal Monitor
Highly accurate film thickness monitoring and rate control is possible
Taking advantage of the technology of quartz device manufacturing equipment that has been cultivated for many years by our company, the accuracy of this system has been significantly improved compared to the conventional measurement method by adopting the frequency measurement method with a network analyzer.
Features
- 1. New method of measurement
- 2. Improved film thickness control accuracy
- 3. Improved deposition rate stability
- 4. Realization of life extension of crystal oscillator
Rate stability
- ・COÅT LEADER and another company’s deposition controller each formed a film on 1 piece of quartz crystal.
- ・Rate stability: confirmed that transducers can be used longer and more stably than those made by other companies
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is a registered trademark of Showa Shinku.