High Usage Efficiency Cathode
Achieved over 40% usage efficiency!
We have improved the conventional 5 x 7inch cathode and developed a cathode with a usage efficiency of 40% or more.
By extending the target life, the maintenance cycle becomes longer, and the recovery loss of precious metal targets is also reduced.
Applications
Suitable for precious metal target and thick film deposition
特長
- 1. The use efficiency is as high as 44%.
- 2. Modification of the existing 5 x 7 inch cathode is also possible.
- 3. 5 x 10 inch cathodes is also available.
* Usage efficiency is out of warranty.