Internal heat type oil diffusion pump, etc.
Optical film thickness control system, etc.
Image Recognition System 
Edge Computing System for Predictive Maintenance EPIoT®
Hall Accelerated Ion Source / Plasma Bridge Neutralizer ISH-030/PBN-80
High power RF Ion Source ISG Series
Ion source for Etching IGF Series
High Usage Efficiency Cathode
Power Saving Device for Oil Diffusion Pump ECO-22/26
Edge Computing System for Predictive Maintenance EPIoT®
Hall Accelerated Ion Source / Plasma Bridge Neutralizer ISH-030/PBN-80
High power RF Ion Source ISG Series
Ion source for Etching IGF Series
High Usage Efficiency Cathode
Power Saving Device for Oil Diffusion Pump ECO-22/26