Vacuum Coater for optical thin film Sapio 1300/1550 (Vacuum equipment)

for Optical Devices

Vacuum evaporation system
Sapio series（SGC-S900 / 1300/1550/1700）

Ultra-high Spec Vacuum Coater for optical multilayer Sapio 1300/1550

High-performance model in pursuit of batch-to-batch deposition reproducibility

General Outline

Reproducibility of film formation…A newly developed fiber-type optical monitor and disk-type 80-point monitor glass capable of stable temperature control are used. Achieves high accuracy with designed characteristics.
Film quality stability ... By exhaust gas measures thoroughly, even if the inside of the chamber is dirty, it achieves stabilization of film quality as well as characteristics.
Low particle ...Count plan to turbulence flow, antifouling near evaporation source and tuning electron beam gun realized “LOW particle”
High-power ion source ... Equipped with a high-power ion source designed specifically for Sapio, it supports a wide range of film formation from multilayer optical filters to resin substrates.

Features/ Options

High efficiency exhaust system
High precision film thickness control system Wavenavigator, Lafio
High Power, Large Area Irradiated RF Ion Source ISG Series
Low particle specification (optional)

Applications

Optical multilayer filter (IR cut filter, band pass filter, etc.)
Various antireflective films
Increasing reflection mirror etc

Specifications

Vacuum chamber size	φ900mm	φ1,300mm	φ1,550mm
Dome size	φ800mm	φ1,150mm	φ1,400mm
size	W4,000mm D5,800mm H2,600mm	W4,500mm D6,000mm H2,700mm	W4,900mm D6,500mm H3,200mm
weight	4,700kg	6,600kg	9,300kg
Exhaust system	22inchDP×1 Meissner trap	22inchDP×2 Meissner trap	26inchDP×2 Meissner trap
Substrate Heating	Halogen lamp heater or Sheath heater　～350℃
Electron gun	180° or 270°Deflection type
Ion source	Grid type RF ion source φ130, 180, 230
Optical film thickness meter	Lafio Plus other
Crystal film thickness meter	Single or 6-row sensor head + COÅT LEADER
Other	CP specification, TMP specification, reversing pallet mechanism, rotating and revolving jig, resistance heating, direct monitor, ECO22 etc.

*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law. Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.

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