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for Electronic Devices  (Sputtering & Ion Plating)

Ion Plating Equipment   SIP-1600

Ideal for the customers considering dried ornaments/painting
and their production increase

Ion plating equipment SIP-1600

Outline

  1. This equipment can form a metal film on the resin substrate.
  2. Two kinds of materials can be coated in the same batch.
  3. Provides high productivity with two sets of internal jigs and carriages attached.
  4. The ion plating mechanism enables a film to be deposited with excellent uniform thickness.

Features

  1. Six-axis or eight-axis rotation/revolution jigs can be equipped depending on work size.
  2. The resistor heating vapor source is equipped with switching electrodes (two sets).
  3. The ion plating mechanism is included.
  4. Equipped with two sets of jig carriages as standard.
  5. Since equipped with freezer, the exhaust speed for H2O is improved.
  6. Provides a lineup of different chamber sizes depending on production volume.

Applications

  1. Various decorative formed films
  2. Discontinuous film
  3. Protection film against electromagnetic radiation

Specifications

Ultimate pressure
Order of 10-4 Pa
Pumping speed
within 20 min from atmospheric pressure to 6.7 × 10-3Pa
Internal jigs
Rotation/revolution type
6 axes (Φ440mm × H1650mm/axis: Work mounted area)
8 axes (Φ360mm × H1650mm/axis: Work mounted area)
Number of rotation/revolution
6 axes: 11 to 33 rpm for rotation/ 1 to 3 rpm for revolution
8 axes: 13 to 37 rpm for rotation /1 to 3 rpm for revolution
Vacuum chamber
Φ1600mm × H2300mm(made of SS400)
Footprint
W4700mm × D7000mm × H3100mm

Required Values

Electricity
Equipment proper: Φ3 200V approx. 12kVA
Resistor vapor source: Φ1 200V AC, 40kVA
Water volume
0.2MPa or higher (differential pressure), 4.8m3/h 20 to 25°C
Maximum pressure at the cooling water inlet: 0.4 MPa or less
Water quality: equivalent to city water
Compressed air
0.5Mps or higher, Connection bore: 8A(Rp 3/4), 70 NL/min
Gas pressure
0.03MPa (setting pressure: 0.02MPa)
Connection bore: SWL1/4

*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law. Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.