for Electronic Devices (Sputtering & Ion Plating)
Ion Plating Equipment SIP-1600
Ideal for the customers considering dried ornaments/painting
and their production increase
Outline
- This equipment can form a metal film on the resin substrate.
- Two kinds of materials can be coated in the same batch.
- Provides high productivity with two sets of internal jigs and carriages attached.
- The ion plating mechanism enables a film to be deposited with excellent uniform thickness.
Features
- Six-axis or eight-axis rotation/revolution jigs can be equipped depending on work size.
- The resistor heating vapor source is equipped with switching electrodes (two sets).
- The ion plating mechanism is included.
- Equipped with two sets of jig carriages as standard.
- Since equipped with freezer, the exhaust speed for H2O is improved.
- Provides a lineup of different chamber sizes depending on production volume.
Applications
- Various decorative formed films
- Discontinuous film
- Protection film against electromagnetic radiation
Specifications
- Ultimate pressure
- Order of 10-4 Pa
- Pumping speed
- within 20 min from atmospheric pressure to 6.7 × 10-3Pa
- Internal jigs
- Rotation/revolution type
6 axes (Φ440mm × H1650mm/axis: Work mounted area)
8 axes (Φ360mm × H1650mm/axis: Work mounted area)
- Number of rotation/revolution
- 6 axes: 11 to 33 rpm for rotation/ 1 to 3 rpm for revolution
8 axes: 13 to 37 rpm for rotation /1 to 3 rpm for revolution
- Vacuum chamber
- Φ1600mm × H2300mm(made of SS400)
- Footprint
- W4700mm × D7000mm × H3100mm
Required Values
- Electricity
- Equipment proper: Φ3 200V approx. 12kVA
Resistor vapor source: Φ1 200V AC, 40kVA
- Water volume
- 0.2MPa or higher (differential pressure), 4.8m3/h 20 to 25°C
Maximum pressure at the cooling water inlet: 0.4 MPa or less
Water quality: equivalent to city water
- Compressed air
- 0.5Mps or higher, Connection bore: 8A(Rp 3/4), 70 NL/min
- Gas pressure
- 0.03MPa (setting pressure: 0.02MPa)
Connection bore: SWL1/4
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.