for Electronic Devices (Sputtering & Ion Plating)
Ion Plating Equipment with Hollow Cathode System SIH-400T
Decorative film / hardened film deposition equipment
General Outline
This is an ion plating equipment with a HCD (hollow cathode) evaporation source.
It is suitable to form decorative films and TiN hardened films. The inner diameter of vacuum chamber is φ400 mm × 500 mm. So it is compact and easy to handle.
The color of the decoration films can be changed by varying the types of introduced gas: Ar, N2, O2 and C2H2.
Features / Options
- By changing the reaction gas, it is possible to form decorative films and hardened films (TiN film).
- The body has a compact design of W1,340mm x D1, 120mm x H1, 938mm.
- TiNx, TiOx, TiCx or TiCxNy films can be formed.
Applications
Accessories
Fishing tackle
Cutting tools
Specifications
- Processing method
- Batch type
- Exhaust pump
- RP＋TMP
- Installation dimensions
- W1,340㎜ × D1,200㎜ × H1,950㎜
- Equipment weight
- 1,300 kg
- Power supply capacity
- AC200V（3φ） / 29kVA（84A）
- Chamber size
- φ400㎜ × H500㎜
Film Forming Samples
| ■Gold color type (TiNx) |  |
| ■Black color type (TiCxNy) (x>y) |  |
| ■Blue color type (TiOx) |  |
| ■Brown color type (TiCxNy) (x<y) |  |
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
