for Quartz Devices
High Vacuum Annealing Equipment SAF-52T-Ⅱ
Outline
Efficient cycle time
Minimized space
Features
- This equipment is developed for performing heat treatment mainly to eliminate
internal stress distortion generated during the working of quartz oscillators
etc. and to stabilize electrode films.
- It can accommodate up to 60 standard trays of 170 × 134 mm with 10 tiers of W460 × D350 × H35 mm heating shelves on the left and right side in total.
- It provides you with two processing rooms able to operate independently, contributing to the efficient production and reduction of cycle time.
Specifications
- Outer Dimension
- W1700 × D900 × H1700 mm
- Equip. Weight
- 1200 kg
Performances
- Ultimate pressure
- 6.7 × 10-4 Pa or lower (Two chamber pumping)
- Pumping time
- 20 min to reach 6.7 × 10-3 Pa (Two chamber pumping)
- Maximum temperature
- 300°C
(Surface temperature in the center of test sample tray)
- Normal temperature
- 250°C
(Surface temperature in the center of test sample tray)
- Temperature adjustment accuracy
- within ±15°C
(Surface temperature in the center of test sample tray at 250°C)
- Temperature rise time
- approx. 60 min to reach 250°C form the room temperature
- Number of processing trays
- 60 sheets (for work trays of 170 mm × 134 mm)
- Pumping system
- Turbo molecular pump, Rotary pump
- Vaccuum gauge
- Penning vacuum gauge × 2
Pirani vacuum gauge × 2
Required Values
- Electricity
- 200V AC, 3-phase, 22.4 kVA (64.7A)
- Water
- Input pressure: 0.3 to 0.4 MPa, Diff. Pressure: 0.2 MPa or higher
Temperature: 20 to 25°C (Non-condensing during operation)
Flow rate: approx. 0.66 m3/hr (11 L/min)
- Compressed air
- Supply pressure: 0.5 to 0.7 MPa, Setting pressure: 0.5 MPa
- Gas (for N2 gas leak)
- Supply pressure: 0.2 MPa or higher
Setting pressure: 0.05 to 0.1 MPa
*For the improvement of product, please understand that the specifications are subject to change without prior notice.
**This product may be applicable to export control products such as strategic raw materials which are regulated by the Foreign Exchange and Foreign Trade Control Law.
Accordingly when you bring out the applicable products outside Japan. You should take a necessary action such as application of an export permit to the Government of Japan.
