| ■ | Hardware
Engineering to Create Vacuum Condition |
| | Design
capability and production engineering & know-how |
| | |
| ■ | Material Handling
Robotics in Vacuum |
| | Conveying substrates in
vacuum tank and controlling functional components in the mechanism |
| | |
| ■ | PC-based
Automatic Control System Engineering |
| | Control
of vacuum equipment including
| 1） | Consistent actuation of individual units which
constitute the equipment | | 2） | Preparation of optimum condition
in vacuum tank | |
| | |
| ■ | Methodology
Software for Film-coating in Vacuum |
| | Engineering
for coating thin film on substrates in vacuum |
